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Automation solutions for the semiconductor industry
The right solution no matter the application: Rexroth offers the world’s largest automation technology portfolio for the semiconductor industry. The engineering teams which develop our scalable, cross-technology systems have unrivalled application expertise.
The semiconductor industry has a very special set of automation needs including mechatronic modules designed for smooth motion during wafer handling, non-contact material through the process chambers and nano-meterscale positioning accuracies. Rexroth has more than ten years of in-depth application experience in the industry. This concentrated expertise is channeled into the ongoing development of new components, modules and product lines for the entire front end and back end.
NYCe4000
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Motion control for semiconductor applications.
Experience our automation solutions in 3D.
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Control City -
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